1. Further Investigation of Slurry Additives for Selective Polishing of SiO2 Films over Si3N4 Using Ceria Dispersions. (16th July 2015) Authors: Penta, Naresh K.; Amanapu, H. P.; Babu, S. V. Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 11(2015) Page Start: P5025 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Further Investigation of Slurry Additives for Selective Polishing of SiO2 Films over Si3N4 Using Ceria Dispersions. (1st January 2015) Authors: Penta, Naresh K.; Amanapu, H. P.; Babu, S. V. Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 11(2015) Page Start: P5025 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects. (1st January 2016) Authors: Sagi, K. V.; Amanapu, H. P.; Alety, S. R.; Babu, S. V. Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 5(2016) Page Start: P256 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects. (25th February 2016) Authors: Sagi, K. V.; Amanapu, H. P.; Alety, S. R.; Babu, S. V. Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 5(2016) Page Start: P256 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗